Figure 2

(a) STEM HAADF image of Ti/Ta2O3−x/Pt RRAM device, (b) high resolution STEM bright field image of the device with FFT (STEM). Red squares indicate the amorphous and crystalline nature of Ta2O3−x and Pt, respectively, (c) EDX profiles of the all elements within Ti/Ta2O3−x/Pt structure showing the thickness of Ta2O3−x thin film and (d) individual line profiles of every elements of the device along the vertical direction.