Figure 3 | Scientific Reports

Figure 3

From: Dielectric Breakdown and Post-Breakdown Dissolution of Si/SiO2 Cathodes in Acidic Aqueous Electrochemical Environment

Figure 3

Representative SEM and TEM images of the inverted-pyramidal structure resulting from cathodic breakdown and post-breakdown etching. SEM images of (a) the top-view and (b) a cross-sectional side view along the trajectory indicated by the yellow dotted line in (a). Cross-sectional TEM images of (c) the undamaged Si{100} surface (yellow-dotted circle in (b)) and (d) the sidewall of the inverted-pyramidal structure that displays the stepped Si{111} surface (red-dotted circle in (b)).

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