Table 2 Comparison of the various parameters including μsat, Vth, Ion/Ioff ratio and SS for a-STO TFTs annealed at different conditions.
Annealing temperature (°C) | μsat (cm2/Vs) | Vth (V) | Ion/Ioff (×106) | SS (V/decade) |
|---|---|---|---|---|
As-deposition | — | — | — | |
250 | 5.24 ± 0.55 | 4.02 ± 1.77 | 6.17 ± 0.91 | 0.70 ± 0.23 |
300 | 6.78 ± 0.14 | 3.41 ± 0.51 | 5.99 ± 0.49 | 0.82 ± 0.15 |
