Figure 1
From: Palladium gates for reproducible quantum dots in silicon

Transmission electron microscopy cross sections of (a) aluminium and (b) palladium gates on top of a Si-SiO2-Al2O3 layer stack capped by Al2O3 and palladium.
From: Palladium gates for reproducible quantum dots in silicon

Transmission electron microscopy cross sections of (a) aluminium and (b) palladium gates on top of a Si-SiO2-Al2O3 layer stack capped by Al2O3 and palladium.