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Figure 1

From: Chemical and structural analysis on magnetic tunnel junctions using a decelerated scanning electron beam

Figure 1

Magnetic tunnel junctions studied. Multilayered structure of MgO(001)//Cr (80)/Pd (5)/Co2Fe0.4Mn0.6Si (30)/MgO (2)/Co0.5Fe0.5 (5)/IrMn3 (10)/Ru (7)/Cr (5)/Au (80) (thickness in nm). The multilayers were patterned into magnetic tunnel junctions (MTJs) by photolithography and Ar-ion milling. MTJs were measured by a four-terminal method, showing a typical tunnelling magnetoresistance (TMR) ratio and resistance-area product (RA) of (a), 110% and 3.8 × 104 Ω µm2 and (b), 18% and 4.7 × 103 Ω µm2, respectively. In the supplementary section there are also results shown from a similar set of devices where CFMS = 5 nm.

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