Figure 1
From: Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
Electrical and electron characteristics of single-rf argon capacitive discharges. (a) Typical discharge voltage and current waveforms of 13.56 MHz (top) and 4.52 MHz (bottom); (b) IRMS-VRMS characteristics of single-rf-driven discharges at 13.56 MHz and 4.52 MHz; and (c) ne and Te as a function of rf power coupled to the plasma. Data in b and c are shown as the mean ± s.d. for all panels; n = 5. The error bar of the x-axis data corresponds to the difference between the input rf power and dissipated rf power or IRMS.
