Figure 2
From: Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
Electrical characteristics of dual-rf argon capacitive discharges. (a) Dual-frequency waveforms of the discharge voltage and current with 0° (top) and 180° (bottom) phase differences between the hf and lf voltage components. (b) VRMS-IRMS characteristics of the lf (solid symbols) and hf (open symbols) components with a 0° phase difference and various Phf. (c) IRMS-VRMS characteristics of dual- and single-frequency capacitive discharges. For clarity, data in b and c are only shown as the mean value for all panels (n = 5). The standard deviations of the y-axis data were <1% of the mean values.
