Figure 3
From: Reflective grating-coupled structure improves the detection efficiency of THz array detectors
(a) A cross-section SEM picture of the grating groove. (b) Optical microscope image of Nb5N6 THz array detectors, the size of a single detector is 210 μm × 185 μm, and the period of the detectors array is 320 μm. (c) Schematic of the reflective grating-coupled structure.
