Figure 1
Nitrogen flow rate contribution to the structural/electrical characteristics of TaNx layers. (a) Representative XRD θ-2θ plots of TaNx layers for various nitrogen flow rates during growth. Corresponding variation in (b) resistivity and (c) Ta/N composition determined by RBS analyses, where each colored line in Fig. 1c represents Ta/N compositions in the grown TaNx layers, for three nitrogen flow rates: 0.4 sccm (red), 1.6 sccm (blue), and 3 sccm (purple). Note that resistivity and N composition increased with increasing nitrogen flow rate during growth.
