Figure 4
From: Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures
Plasma apparatus and allowable plasma characteristics for neutral bremsstrahlung-based electron diagnostics. (a) Schematic of a plasma chamber and relevant experimental setup for producing a parallel-plate capacitive discharge in the pressure range 200–760 Torr. (b) Fraction of the neutral bremsstrahlung emissivity, \({\kappa }_{{\rm{ea}}}/({\kappa }_{{\rm{ea}}}+{\kappa }_{{\rm{ei}}}^{{\rm{ff}}}+{\kappa }_{{\rm{ei}}}^{{\rm{fb}}})\), with 3.0-eV Te at 300 nm as a function of the gas pressure and electron density. Neutral bremsstrahlung-based electron diagnostics is valid under the conditions in the white region.
