Table 2 Calculated charged vacancy formation energy obtained from Eq. (1) with EF = 0 eV and Ga-rich. All values are in eV.

From: Interaction between hydrogen and gallium vacancies in β-Ga2O3

Charge

Our results

HSE 06

Ref.7

HSE 06

VGa1-H

VGa1-2H

VGa1-3H

VGa1-4H

VGa2-H

VGa2-2H

VGa2-3H

VGa2-4H

VGa1-H

VGa2-H

1+

5.87

0.33

−4.04

−8.13

4.15

−0.80

−5.29

−9.88

6.47

5.85

0

6.76

2.23

−2.76

 

5.53

0.74

−3.61

 

7.63

6.64

1−

8.29

3.87

  

7.78

2.79

  

9.29

8.32

2−

10.50

   

10.30

   

11.97

10.86

3−

17.74

   

16.30