Figure 2
From: Chiral visible light metasurface patterned in monocrystalline silicon by focused ion beam
Chiral metasurface upon annealing: SEM-image of the surface, tilted by 52° view (a); three exemplary consecutive FIB cuts used for the 3D reconstruction (b); average surface relief within a unit cell resolved by AFM (c); profile of the Si/SiO2 interface resolved by 3D reconstruction (d); 3D model of the unit cell after annealing (e).
