Figure 5
From: Comparison of frequency and strain-rate domain mechanical characterization
Nano-indentation setup (adapted from our previous work on multimodal ferrule-top sensing8). The inset shows a schematic side view of our ferrule-top cantilever sensor operated by a vertical piezoelectric actuator. The load imparted on the sample surface by the spherical tip is equal to the cantilever stiffness times its deflection (read via interferometry), while the resultant indentation depth into the sample is given by the difference in between piezo-motor displacement downwards and the resultant cantilever deflection upwards.
