Figure 1

Schematic of the fabrication process of the electrode arrays. (A) Spin-coating of silicone rubber onto a ceramic carrier. (B) Lamination of the metal layer. (C) Structuring of the metal. (D) Removal of the metal excess. (E) Parylene C coating. (F) Laser pyrolysis of the active site and structuring of the electrodes (700 µm in diameter). (G) Opening of the metal pads. (H) Device releasing.