Figure 5

Monte Carlo TEM image simulation of Xe precipitates in a-SiO2 at 295 K and comparison with experiment: (a) top view of the simulation box; (b) BF-TEM image simulated using 5000 electrons per spot; (c) at-focus experimental BF-TEM image; (d) experimental transmitted electron intensity profile along the line (cyan) shown in (c), 6-point FFT data smoothing filter (orange) and simulated line scans for 5000 (dotted black line) or 105 (solid red line) electrons per spot, respectively; (e) vertically shifted simulated intensity profiles for easier visual comparison; and (f) experimental (green line), 6-point FFT data smoothing filter (grey line) and simulated profiles (red line) across the 20 nm diameter void seen at the lower right corner in Fig. 4(a).