Table 2 Uncertainty budget of the diameter measurement.

From: A Hybrid Non-destructive Measuring Method of Three-dimensional Profile of Through Silicon Vias for Realization of Smart Devices

Source of uncertainty

Uncertainty value

@ ϕ = 5.954 μm

Uncertainty of the measurement reproducibility of the diameter, uRep(ϕ)

13 nm

Uncertainty of the calibration process, ucal(ϕ)

103 nm

Expanded uncertainty of the diameter, U(ϕ)

208 nm (k = 2)

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