Figure 3
COMSOL temperature simulations. (a) A top-down view of an inverted pyramid, and the temperature distribution on the inclined surface of the structure when irradiated with a laser from the top with a fluence of 15 mJ/cm2. This shows the temperature of the 50-nm TiN film. (b) A top-down view of an upright pyramid, and the temperature distribution on the inclined surface of the structure when irradiated with a laser from the top with a fluence of 15 mJ/cm2. This shows the temperature of the 50-nm TiN film. Both simulations reflect actual pyramid sizes, with a base length of 2.4 µm and depth/height of 1.6 µm.
