Table 1 Damage threshold doses estimated from experimental data and the corresponding critical fractions of X-ray excited electrons calculated with Eq. (1) for the constituents of coated bilayer systems (tested here) and for diamond.

From: X-ray induced damage of B4C-coated bilayer materials under various irradiation conditions

Sample

Ddamage [eV/atom]

Rdamage [%]

B 4 C

~0.75

3.7–5.6

SiC

~0.94

3.3–4.9

Si

~0.90

6.7–10.0

C(diamond)

~0.70

1.0–1.6