Table 2 The evaluation results obtained from ALQFM of 30 batches of GE samples from three different manufacturers.
Sample | 203 nm | 220 nm | 250 nm | 280 nm | 344 nm | Fusion | ||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
S L | PL% | α | Grade | S L | PL% | α | Grade | S L | PL% | α | Grade | S L | PL% | α | Grade | S L | PL% | α | Grade | S L | PL% | α | Grade | |
S1 | 0.914 | 56.1 | 0.105 | 7 | 0.939 | 69.8 | 0.080 | 6 | 0.952 | 94.8 | 0.018 | 2 | 0.914 | 82.0 | 0.068 | 4 | 0.958 | 76.2 | 0.025 | 5 | 0.927 | 76.4 | 0.015 | 5 |
S2 | 0.889 | 54.2 | 0.093 | 7 | 0.944 | 67.2 | 0.063 | 6 | 0.969 | 88.1 | 0.004 | 3 | 0.925 | 78.1 | 0.052 | 5 | 0.957 | 69.8 | 0.023 | 6 | 0.945 | 73.6 | 0.014 | 5 |
S3 | 0.910 | 55.6 | 0.181 | 7 | 0.941 | 69.5 | 0.071 | 6 | 0.963 | 88.6 | 0.119 | 3 | 0.919 | 80.6 | 0.067 | 4 | 0.957 | 73.0 | 0.007 | 5 | 0.943 | 75.1 | 0.040 | 5 |
S4 | 0.900 | 86.5 | 0.178 | 4 | 0.946 | 78.5 | 0.070 | 5 | 0.971 | 97.1 | 0.068 | 2 | 0.922 | 83.2 | 0.048 | 4 | 0.961 | 71.5 | 0.021 | 5 | 0.944 | 88.3 | 0.021 | 3 |
S5 | 0.925 | 87.4 | 0.149 | 3 | 0.948 | 77.4 | 0.054 | 5 | 0.973 | 94.2 | 0.082 | 2 | 0.910 | 81.4 | 0.046 | 4 | 0.961 | 69.9 | 0.008 | 6 | 0.943 | 85.1 | 0.029 | 3 |
S6 | 0.816 | 73.7 | 0.088 | 5 | 0.884 | 71.5 | 0.036 | 5 | 0.960 | 74.6 | 0.051 | 5 | 0.870 | 73.6 | 0.029 | 5 | 0.897 | 72.0 | 0.059 | 5 | 0.899 | 76.1 | 0.010 | 5 |
S7 | 0.864 | 85.1 | 0.108 | 3 | 0.932 | 77.5 | 0.032 | 5 | 0.979 | 99.2 | 0.119 | 3 | 0.901 | 85.7 | 0.083 | 3 | 0.950 | 74.5 | 0.029 | 5 | 0.936 | 88.8 | 0.053 | 3 |
S8 | 0.892 | 88.5 | 0.093 | 3 | 0.941 | 81.1 | 0.041 | 4 | 0.963 | 101.8 | 0.036 | 1 | 0.927 | 84.2 | 0.010 | 4 | 0.959 | 75.7 | 0.035 | 5 | 0.942 | 91.9 | 0.010 | 2 |
S9 | 0.885 | 48.3 | 0.126 | 8 | 0.925 | 66.3 | 0.089 | 6 | 0.964 | 94.9 | 0.014 | 2 | 0.892 | 80.1 | 0.064 | 4 | 0.916 | 66.6 | 0.081 | 6 | 0.915 | 74.5 | 0.046 | 5 |
S10 | 0.894 | 54.4 | 0.085 | 7 | 0.926 | 71.3 | 0.016 | 5 | 0.983 | 91.0 | 0.057 | 2 | 0.917 | 89.5 | 0.111 | 3 | 0.950 | 78.7 | 0.000 | 5 | 0.944 | 77.1 | 0.044 | 5 |
S11 | 0.953 | 133.2 | 0.113 | 6 | 0.976 | 118.4 | 0.002 | 4 | 0.989 | 112.2 | 0.029 | 3 | 0.979 | 116.1 | 0.000 | 4 | 0.990 | 110.6 | 0.011 | 3 | 0.969 | 114.7 | 0.032 | 3 |
S12 | 0.965 | 139.1 | 0.089 | 6 | 0.976 | 122.8 | 0.066 | 5 | 0.978 | 116.4 | 0.051 | 4 | 0.975 | 125.0 | 0.059 | 5 | 0.981 | 123.0 | 0.063 | 5 | 0.960 | 124.2 | 0.020 | 5 |
S13 | 0.949 | 139.2 | 0.015 | 6 | 0.968 | 120.5 | 0.009 | 5 | 0.985 | 112.1 | 0.003 | 3 | 0.975 | 120.9 | 0.053 | 5 | 0.987 | 119.7 | 0.023 | 4 | 0.969 | 122.7 | 0.024 | 5 |
S14 | 0.946 | 131.2 | 0.123 | 6 | 0.967 | 120.6 | 0.076 | 5 | 0.987 | 106.2 | 0.021 | 2 | 0.969 | 120.2 | 0.088 | 5 | 0.974 | 118.6 | 0.089 | 4 | 0.963 | 113.9 | 0.054 | 3 |
S15 | 0.916 | 129.0 | 0.075 | 5 | 0.969 | 116.2 | 0.014 | 4 | 0.964 | 118.4 | 0.077 | 4 | 0.964 | 103.5 | 0.002 | 1 | 0.961 | 97.4 | 0.013 | 1 | 0.942 | 116.3 | 0.014 | 4 |
S16 | 0.931 | 78.5 | 0.040 | 5 | 0.957 | 106.3 | 0.032 | 2 | 0.976 | 105.7 | 0.006 | 2 | 0.969 | 120.2 | 0.078 | 5 | 0.954 | 131.4 | 0.098 | 6 | 0.954 | 103.1 | 0.034 | 1 |
S17 | 0.942 | 81.1 | 0.002 | 4 | 0.974 | 100.9 | 0.023 | 1 | 0.987 | 103.8 | 0.012 | 1 | 0.979 | 115.3 | 0.005 | 4 | 0.988 | 117.4 | 0.056 | 4 | 0.972 | 100.5 | 0.014 | 1 |
S18 | 0.836 | 66.2 | 0.273 | 6 | 0.865 | 95.1 | 0.311 | 6 | 0.942 | 98.7 | 0.230 | 5 | 0.848 | 100.2 | 0.335 | 6 | 0.876 | 105.8 | 0.233 | 5 | 0.903 | 95.9 | 0.197 | 4 |
S19 | 0.950 | 65.3 | 0.118 | 6 | 0.979 | 93.1 | 0.002 | 2 | 0.977 | 100.5 | 0.025 | 1 | 0.982 | 104.3 | 0.005 | 1 | 0.948 | 96.2 | 0.060 | 2 | 0.960 | 91.3 | 0.003 | 2 |
S20 | 0.940 | 71.9 | 0.038 | 5 | 0.968 | 96.5 | 0.071 | 2 | 0.985 | 95.3 | 0.006 | 1 | 0.952 | 103.0 | 0.128 | 3 | 0.957 | 117.9 | 0.059 | 4 | 0.961 | 93.3 | 0.043 | 2 |
S21 | 0.944 | 107.0 | 0.031 | 2 | 0.976 | 105.6 | 0.084 | 2 | 0.954 | 91.8 | 0.058 | 2 | 0.917 | 80.1 | 0.035 | 4 | 0.971 | 97.7 | 0.031 | 1 | 0.946 | 96.5 | 0.001 | 2 |
S22 | 0.947 | 127.5 | 0.043 | 5 | 0.978 | 116.0 | 0.094 | 4 | 0.919 | 105.2 | 0.084 | 2 | 0.919 | 92.2 | 0.000 | 2 | 0.976 | 106.1 | 0.037 | 2 | 0.930 | 110.9 | 0.000 | 3 |
S23 | 0.953 | 123.4 | 0.047 | 5 | 0.973 | 119.4 | 0.116 | 4 | 0.976 | 105.3 | 0.062 | 2 | 0.917 | 91.7 | 0.005 | 2 | 0.975 | 109.3 | 0.033 | 2 | 0.953 | 106.6 | 0.082 | 2 |
S24 | 0.952 | 135.4 | 0.064 | 6 | 0.968 | 121.4 | 0.046 | 5 | 0.969 | 102.0 | 0.031 | 1 | 0.926 | 96.4 | 0.009 | 2 | 0.950 | 118.9 | 0.035 | 4 | 0.956 | 114.3 | 0.015 | 3 |
S25 | 0.944 | 116.8 | 0.058 | 4 | 0.950 | 98.7 | 0.073 | 2 | 0.978 | 102.8 | 0.058 | 2 | 0.948 | 90.1 | 0.115 | 3 | 0.979 | 87.4 | 0.051 | 3 | 0.964 | 103.3 | 0.037 | 1 |
S26 | 0.951 | 116.3 | 0.104 | 4 | 0.973 | 109.1 | 0.076 | 2 | 0.964 | 93.3 | 0.042 | 2 | 0.921 | 85.5 | 0.054 | 3 | 0.976 | 100.6 | 0.012 | 1 | 0.954 | 101.0 | 0.003 | 1 |
S27 | 0.928 | 132.7 | 0.071 | 6 | 0.952 | 112.1 | 0.027 | 3 | 0.981 | 93.7 | 0.018 | 2 | 0.906 | 85.2 | 0.117 | 3 | 0.977 | 108.9 | 0.049 | 2 | 0.949 | 107.2 | 0.032 | 2 |
S28 | 0.928 | 125.1 | 0.059 | 5 | 0.967 | 116.0 | 0.013 | 4 | 0.983 | 106.8 | 0.040 | 2 | 0.915 | 87.3 | 0.218 | 5 | 0.982 | 105.7 | 0.053 | 2 | 0.960 | 113.2 | 0.001 | 3 |
S29 | 0.949 | 73.1 | 0.052 | 5 | 0.965 | 95.1 | 0.001 | 1 | 0.981 | 92.6 | 0.008 | 2 | 0.934 | 87.2 | 0.063 | 3 | 0.974 | 101.8 | 0.088 | 2 | 0.955 | 89.9 | 0.023 | 3 |
S30 | 0.935 | 78.7 | 0.037 | 5 | 0.961 | 103.5 | 0.013 | 1 | 0.982 | 98.1 | 0.030 | 1 | 0.894 | 91.8 | 0.101 | 3 | 0.961 | 115.8 | 0.072 | 4 | 0.952 | 97.7 | 0.016 | 1 |
RFP | 1.000 | 100.0 | 0.000 | 1 | 1.000 | 100.0 | 0.000 | 1 | 1.000 | 100.0 | 0.000 | 1 | 1.000 | 100.0 | 0.000 | 1 | 1.000 | 100.0 | 0.000 | 1 | 1.000 | 100.0 | 0.000 | 1 |