Figure 2
From: Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator

Anchor loss model in COMSOL Multiphysics, where the blue region represents the resonator and the grey region is the PML.
From: Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator

Anchor loss model in COMSOL Multiphysics, where the blue region represents the resonator and the grey region is the PML.