Figure 3
From: Gold-Nanocluster-Assisted Nanotransfer Printing Method for Metasurface Hologram Fabrication
Procedure for Au nanocluster-assisted nanotransfer printing. (a) Si master with angular nanoslits fabricated by e-beam lithography. (b) Replication of angular nanoslits in the Si master using a UV-curable imprint resin and PET film. (c) Peeling of replicating polymer stamp with PET film after UV curing process. (d,e) Replication of angular nanoslits by pillars of replicating polymer stamp fabricated in (c). (f–i) TEM images of Au and SiO2 layers consecutively deposited on polymer stamp to form nanoclusters and thin film with angular nanoslits. (j) Prepared flexible polymer stamp with four alternating layers of Au and SiO2. (k) Nanotransfer printing using a roll-to-place system on adhesive-coated glass substrate to transfer only two layers and removal of flexible polymer stamp with remaining two layers. (l) Deposited SiO2 and Au angular nanopatterns on a polymer stamp transferred to a glass substrate, which resulted in a metasurface hologram.
