Figure 5
From: Focus Tracking System for Femtosecond Laser Machining using Low Coherence Interferometry
(a) Transversal profiles of the machined sample, plotted with their absolute position (height), showing the machined grooves’ shapes at the different longitudinal locations, indicated by arrows in (b); the numbers on the gray regions identify each groove. (b) Longitudinal profile of the tooth (parallel to the grooves) with arrows indicating the positions of the profiles show in (a), highlighting a height variation of 500 μm; the curvature of the surface, seen here, explains the positioning of the profiles in (a). (c) Average width (gray) and depth (black) of the five grooves obtained from the 10 measured longitudinal positions, demonstrating a stable machining across grooves.
