Figure 3

Distribution of integrated ε|E|² in one unit cell along vertical (z-axis) direction for polymer thicknesses of (a) 50 nm and (b) 300 nm. Shown in the inset of (a) are ε|E|² profiles at the center of the PCS in the x-y plane (left) and at the center of the hole in the x-z plane (right), with boundary of hole and Si region shown with dashed lines.