Figure 1 | Scientific Reports

Figure 1

From: Stable and efficient transfer-printing including repair using a GaN-based microscale light-emitting diode array for deformable displays

Figure 1The alternative text for this image may have been generated using AI.

Schematic illustrations and images corresponding to the steps for forming, assembling, and repairing ultrathin μLEDs fabricated from GaN on sapphire substrates: (a) μLED wafers including defective chips (left: schematic; right: optical microscopy image). (b) Selective pick-up of the array of good chips from the μLED wafer to stamp by UV PE (left: schematic; right: optical microscopy image). (c) Imprinting the array of good chips to the PI board substrate that coated the functional layer (left: schematic; right: optical microscopy image). (d) Selective pick-up of the array of good chips for repair from μLED wafer to stamp according to the coordinates of empty spaces on the PI board substrate (left: schematic; right: optical microscopy image). (e) Align-imprinting the array for repairing the array on the PI board substrate (left: schematic; right: optical microscopy image). (f) SEM images of the transferred array on the PI board substrate.

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