Figure 3

Scanning electron microscope images of the VLSDI 2.0 chip. (a) Top view of the chip. Scale bar 80 µm. Images (b–d) shows magnified views of (a) Scale bars 40 µm, 40 µm, 33 µm, respectively. (e–g) show cross-sections of FFG’s at positions marked in (b–d) Scale bars 40 µm, 20 µm, 33 µm, respectively. (h) Back view of the FFGs. Scale bar 107 µm. (i,j) show the cross-sections of delivery channels at locations marked in (h) Scale bars 107 µm and 107 µm, respectively. (k) Magnified view of the trench, via and ffg cross-sections. Scale bar 55 µm. (l,m) show optical micrographs of top view and bottom view at underpass locations in VLSDI 2.0 chip, respectively. Scale bars 1.45 mm and 1.1 mm, respectively. (n–p) Micrographs show cross-section SEM micrographs at positions marked in image (m). The Scale bars 250 µm, 250 µm, and 215 µm. To demonstrate the utility of this approach in materials synthesis, we generate polycaprolactone (PCL).