Figure 1

Dielectric breakdown of SiN membranes by CBD under various pH conditions. (a) Schematic illustration of the setup for dielectric breakdown experiments. (b) Current-time traces during CBD of 20-nm-thick SiN membranes under ten different pH conditions. Vcis and Vtrans were set at 20 V and 0 V during CBD, respectively. (c) TBD of 20-nm-thick SiN membranes under the ten different pH conditions. Vcis and Vtrans were set at 20 V and 0 V during CBD, respectively. The number of plots at each pH is at least four.