Figure 5 | Scientific Reports

Figure 5

From: Stable fabrication of a large nanopore by controlled dielectric breakdown in a high-pH solution for the detection of various-sized molecules

Figure 5

Dependence of the size of the fabricated nanopores on Icutoff. Nanopores were fabricated in 20-nm-thick SiN membranes by CBD at a pH of 12.7 with various Icutoff values. Vcis and Vtrans were set at 18 V and 0 V during CBD, respectively. (a) TEM images of the fabricated nanopores. Scale bars are 20 nm. The areas of the nanopores are surrounded by yellow lines. (b) Dependence of the equivalent diameter (dTEM) of the fabricated nanopores on Icutoff. (c) Relationship between conductance (G) of ionic current through the fabricated nanopores and dTEM. The solid line represents theoretically calculated values.

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