Figure 1 | Scientific Reports

Figure 1

From: Tuning the Electrical and Thermoelectric Properties of N Ion Implanted SrTiO3 Thin Films and Their Conduction Mechanisms

Figure 1The alternative text for this image may have been generated using AI.

(a) X-ray diffraction patterns of STO thin films: STO, STO-N116 and STO-N516. The as-implanted samples for ion fluences 1 × 1016 and 5 × 1016 ion/cm2 show amorphous nature. (b) RBS spectra of STO films: STO, STO-N116 and STO-N516. The inset shows the depth profile of STO film as determined from X-RUMP simulation.

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