Figure 4
From: Ultracompact meta-pixels for high colour depth generation using a bi-layered hybrid metasurface
(a) The cross-sectional (left) and the top/oblique view (right) SEM images of the fabricated sample. The two right images under the top view of Al grating exhibit the top (upper) and oblique (lower) view SEM images of the single layer HSQ-capped silicon nanorods before stacking PMMA spacer and Al grating. The orange scale bars in the two figures denote 50 nm. (b) Captured images of the transmitted light from the fabricated bi-layered hybrid metasurfaces with θ = 45° and various w and l. (c) Transmittance spectra of the fabricated samples (S1–S8). (d) CIE chromaticity diagrams of the simulation (top) and experimental results (bottom). The simulation results are calculated for the proposed structures with various size (w = 30 ~ 110 nm and l = w + 10 ~ 120 nm) at θ = 45° and d = 170 nm.
