Figure 6 | Scientific Reports

Figure 6

From: 3D Smith charts scattering parameters frequency-dependent orientation analysis and complex-scalar multi-parameter characterization applied to Peano reconfigurable vanadium dioxide inductors

Figure 6

Fabricated VO2 reconfigurable Peano inductors with additional various switches lengths and their influence in the on state. (a) Top view of the inductor-whose cross section is depicted in Fig. 5a. (b) SEM photo of a 2.3 μm long switch. (c) SEM photo of a 1.5 μm long switch. (d) Extracted (from the measured S parameters): Lseries of the inductor with 2 switches in on state for 600 nm long switches, 1.5 μm and 2.3 μm. (e), Q of the inductor with 2 switches in on state, for the 600 nm long switches, 1.5 μm and 2.3 μm. (f) Simultaneous 3D Smith chart representation for the 4 GHz-10 GHz frequency of the Lseries, Q and S11 parameters for the three different inductors with 600 nm long switches, 1.5 μm and 2.3 μm long switches.

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