Figure 7
(a) Inner and outer diameters of LFC contact holes with varying laser fluences. The inset figure is the SEM image of the LFC contact hole processed with a 11.6 J/cm2 laser fluence and 5 laser pulses. (b) Depths of LFC contact holes with increasing the number of laser pulses and laser fluences. (c) The normalized resistances of the LFC contact hole arrays as a function of the laser pulses. (d) Schematic of the test structures for the resistance measurements. The pitch of the LFC contact hole arrays is set for 500 µm (6 × 6 arrays). The rear side has a full area Al electrode in ohmic contact with Si substrates. The passivation layers consist of SiOx (20 nm)/SiNx (80 nm) bilayers.
