Figure 8

(a) Fabrication flow of PERC solar cells. (b) Cross-sectional SEM images of the PERC solar cell based on the Si thin foil of a 48 µm thickness (left) and the SiNx passivated emitter textured with the Si nanohole arrays (right). (c) Current-voltage characteristics of the PERC solar cells under illumination of a standard solar irradiation. EQE spectra of the PERC solar cells without texture (planar) and with nanohole arrays.