Table 1 All fabricated thickness combinations of AlN/Ag/AlN thin film stacks on glass and silicon substrates.

From: Plasmonics of Diffused Silver Nanoparticles in Silver/Nitride Optical Thin Films

Label

Top AlN layer [nm]

Ag layer [nm]

Bottom AlN layer [nm]

S1

3

300

20

S2

20

300

20

S3

50

300

20

S4

100

300

20

S5

200

300

20

S6

20

25

20

S7

20

18

20

  1. Supplementary Materials.
  2. Supplementary materials are provided in a separate file. Figures S1−S7. Tables S1–S6.
  3. Samples S1, S2, S3, S4, S5 have controlled variations in top AlN layer thicknesses for fixed bottom 300 nm Ag/20 nm AlN layers, while samples S2, S6, S7 have controlled variations in middle Ag layer thicknesses between fixed 20 nm AlN layers.
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