Figure 6
From: A Silicon Photonic Data Link with a Monolithic Erbium-Doped Laser
Simplified diagram illustrating the silicon photonic platform utilized for the link system. The platform includes two Si3N4 layers, a silicon layer with different doping levels, two metal layers, two via layers, a Ge layer for the photodetector, and a trench for deposition of the erbium-doped Al2O3 thin film.
