Figure 4
From: Integrated photonic guided metalens based on a pseudo-graded index distribution
SEM images of the fabricated metalens: (a) metalens fabricated without lateral sustaining strips, (b) resist after lithography with lateral sustaining strips, (c) final metalens fabricated with lateral sustaining strips, (d) zoomed-in view of the maximal filling factor region, and (e) zoomed-in view of the minimal filling factor region. The strips widths from the centre to border are 200 nm, 180 nm, 170 nm, 155 nm, 140 nm, 110 nm, and 40 nm.
