Table 1 Most relevant parameters of the mechanical and optical analysis of coating materials before and after the annealing.

From: Observation of a Correlation Between Internal friction and Urbach Energy in Amorphous Oxides Thin Films

Coating

ϕc @ 10 kHz · 10−4

Thickness (nm)

EU (meV)

Eg (eV)

MSE

Ta2O5

6.42 ± 0.15

579 ± 2

164 ± 8

4.1 ± 0.2

4.0

Ti:Ta2O5

6.3 ± 0.2

500 ± 2

152 ± 5

3.6 ± 0.1

4.1

Ta2O5 ann.

4.77 ± 0.15

592 ± 2

130 ± 10

4.0 ± 0.1

11.0

Ti:Ta2O5 ann.

3.9 ± 0.2

509 ± 2

108 ± 5

3.6 ± 0.1

5.2

Nb2O5

8.3 ± 1.3

470 ± 2

110 ± 10

3.4 ± 0.1

5.9

Nb:TiO2

7.6 ± 0.5

482 ± 2

108 ± 5

3.3 ± 0.1

7.7

Nb2O5 ann.

4.5 ± 1.5

483 ± 2

80 ± 10

3.4 ± 0.1

7.1

Nb:TiO2 ann.

4.0 ± 0.4

490 ± 2

80 ± 5

3.3 ± 0.1

7.6

  1. The reported coating loss angle \({\phi }_{c}\) is the value at 10 kHz obtained by applying to each data set shown in figure 3.1 a least-square regression fitting with a frequency-dependent loss. EU and Eg are the Urbach energy and Energy gap, respectively. The fit uncertainty on optical parameters and the Mean Square Error (MSE) are provided by the regression code (WVASE).
Back to article page