Figure 3
From: Wide Dynamic Range, Angle-Sensing, Long-Wave Infrared Detector Using Nano-Antenna Arrays
Topology of the final design of the angle-sensing detector. (a) The device is composed of two, back-to-back Yagi-Uda antenna arrays that share the same reflector element. The antenna elements are all made out of nickel and the center element in each array also acts as the bolometer. The bias lines are made of gold, which has a lower TCR compared to nickel. (b) The cross-sectional view of the detector shows all the layers and their thicknesses in the substrate and antenna. Au is the material used to fabricate the bias lines and pads. However, due to wirebonding procedure, pads are made of a thicker Au film. All dimensions are in μm.
