Table 2 AMSEs of waveguide stress symmetry.

From: Control of Laser Induced Cumulative Stress for Efficient Processing of Fused Silica

 

90 mW

110 mW

130 mW

Multiscan

2.75 nm2

14.02 nm2

19.85 nm2

Halfscan

0.48 nm2

0.32 nm2

2.12 nm2

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