Figure 2

The imaging system using LV-STEM in SEM for observing 3D DNA nanostructures. The primary beam was focused on and scanned across each specimen. The DF-STEM detector collected scattered electrons by the interaction with the specimens, mainly at low angles, to acquire transmission images. The SE detector collected secondary electrons for surface imaging. Supporting substrates were carbon films with a thickness of 3 nm that were oxidized by plasma pretreatment.