Figure 2
From: A discrete core-shell-like micro-light-emitting diode array grown on sapphire nano-membranes
SEM images for the fabrication process of a sapphire nano-membrane array. (a) Plan-view and (b) cross-section SEM images of ALD alumina layer deposited on the first stripe-shaped PR pattern. (c) Plan-view and (d) cross-section SEM images of the second PR pattern on the ALD alumina layer. (e) Plan-view and (f) cross-section SEM images of a cavity-incorporated alumina nano-membrane array. (g) Plan-view and (h) cross-section SEM images of a sapphire nano-membrane array after thermal treatment.
