Figure 3

Schematic diagram of the Pa-μOLM fabrication process. The designed Pa-μOLM with two wafer-level microlens arrays was fabricated using thermal reflow and a two-step ultraviolet (UV)-imprinting process. The master microlens array and UV-transparent mold were fabricated preferentially. UV-imprinting was conducted to fabricate the OMA and IMA on both sides of a glass substrate.