Figure 3 | Scientific Reports

Figure 3

From: Gigapixel confocal imaging using a massively parallel optical probe array with single directional infinite scanning

Figure 3

Schematic diagram of the Pa-μOLM fabrication process. The designed Pa-μOLM with two wafer-level microlens arrays was fabricated using thermal reflow and a two-step ultraviolet (UV)-imprinting process. The master microlens array and UV-transparent mold were fabricated preferentially. UV-imprinting was conducted to fabricate the OMA and IMA on both sides of a glass substrate.

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