Figure 9

2.23 gigapixel imaging result of TFT glass at a resolution of 100 DPI. (a) Sample image at 392 mm × 300 mm; (b) the imaging result of LCD TFT glass. The reconstruction image was 79.5 mm × 28.0 mm, and (c) enlargement of a small area of (b). The minimum linewidth of 5.0 μm was clearly visible over the entire imaging area.