Table 1 Measured pattern dimensions and MTF at a line with a width of 15.0 μm.

From: Gigapixel confocal imaging using a massively parallel optical probe array with single directional infinite scanning

Position

phor (μm)

pver (μm)

MTF @ 15 μm

1–1

280.18

140.16

0.405

1-2

279.86

140.08

0.403

1-3

279.94

139.92

0.396

2-1

280.02

140.02

0.407

2-2

280.02

140.14

0.403

2-3

280.22

139.86

0.396

3-1

279.94

140.15

0.397

3-2

280.30

140.18

0.403

3-3

280.20

139.93

0.401

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