Figure 2 | Scientific Reports

Figure 2

From: Efficient NH3-based process to remove chlorine from electron beam deposited ruthenium produced from (η3-C3H5)Ru(CO)3Cl

Figure 2

Electron-stimulated desorption (ESD) data obtained during electron exposure at E0 = 31 eV from an adsorbed layer of (η3-C3H5)Ru(CO)3Cl on Ta held at 110 K. (a) Mass spectrum recorded during the initial stage of electron exposure and blow-up of the spectrum above m/z 30. (b) Decay of CO signal (m/z 28) as function of electron exposure. The total exposure of this experiment amounted to 1.25·1017 e−/cm2 and the sample current dropped slightly from Ip = 100 μA to 96 μA during the entire irradiation period.

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