Figure 5 | Scientific Reports

Figure 5

From: Efficient NH3-based process to remove chlorine from electron beam deposited ruthenium produced from (η3-C3H5)Ru(CO)3Cl

Figure 5

(a) Electron-stimulated desorption (ESD) signals at m/z 41 (C3 hydrocarbon) and m/z 36 (HCl) recorded during an electron exposure of 1.25·1017 e/cm2 at E0 = 31 eV of (η3-C3H5)Ru(CO)3Cl on Ta held at 110 K. (b) Thermal desorption spectra (TDS) recorded following the same ESD experiments. The data plotted in black refer to an experiment performed in the absence of NH3 while the precursor layer was covered by NH3 in the case of the data plotted in blue.

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