Figure 3

(a) The lens profile for MLAs fabricated on PMMA substrates with various contact angles of UV resin. (b) The NA of microlenses as a function of surface contact angle, the inset shows a typical optical micrograph of a drop of UV resin on PMMA substrate showing surface contact angle of 88.7°. (c) The photo of a 31-inch MLAs fabricated on PMMA substrate with TMCS treatment of 55 min and with inverted reflowing time of 1 h. The uniformity information in terms of the height (d) and diameter (e) information of 50 randomly selected micro-lenses from the MLAs shown in Fig. 4c. (f) A typical AFM image of the surface of micro-lens over a 5 μm × 5 μm area, showing excellent surface quality.