Figure 5
From: Nano-scale depth-varying recrystallization of oblique Ar+ sputtered Si(111) layers
RBS random and RBS/C spectra along the ⟨111⟩ axis in amorphized Si(111) samples.
Figure 5 | Scientific Reports
From: Nano-scale depth-varying recrystallization of oblique Ar+ sputtered Si(111) layers
RBS random and RBS/C spectra along the ⟨111⟩ axis in amorphized Si(111) samples.
