Figure 7
From: Nano-scale depth-varying recrystallization of oblique Ar+ sputtered Si(111) layers
Amorphous content and relative stress for amorphized samples as a function of off-normal incidence.
Figure 7 | Scientific Reports
From: Nano-scale depth-varying recrystallization of oblique Ar+ sputtered Si(111) layers
Amorphous content and relative stress for amorphized samples as a function of off-normal incidence.
