Figure 11 | Scientific Reports

Figure 11

From: AlN formation by an Al/GaN substitution reaction

Figure 11

(a) Holding time dependence of the AlN thicknesses after heat treatment of the Al/GaN samples at 1473–1673 K. Error bars show the standard deviation of the AlN thickness. (b) Relation between square of the AlN thickness and holding time, and (c) Arrhenius plot of the AlN growth by the substitution reaction method.

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