Figure 7
Residual stresses along the a- and c-axis of the AlN layers obtained after heat treatment of Al/GaN samples with various heat treatment temperatures and holding times together with those of bulk AlN.
Figure 7 | Scientific Reports
Residual stresses along the a- and c-axis of the AlN layers obtained after heat treatment of Al/GaN samples with various heat treatment temperatures and holding times together with those of bulk AlN.
